JPH01161258U - - Google Patents
Info
- Publication number
- JPH01161258U JPH01161258U JP5441188U JP5441188U JPH01161258U JP H01161258 U JPH01161258 U JP H01161258U JP 5441188 U JP5441188 U JP 5441188U JP 5441188 U JP5441188 U JP 5441188U JP H01161258 U JPH01161258 U JP H01161258U
- Authority
- JP
- Japan
- Prior art keywords
- electron gun
- vacuum
- evaporation apparatus
- vacuum evaporation
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009429 electrical wiring Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5441188U JPH01161258U (en]) | 1988-04-22 | 1988-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5441188U JPH01161258U (en]) | 1988-04-22 | 1988-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01161258U true JPH01161258U (en]) | 1989-11-09 |
Family
ID=31280344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5441188U Pending JPH01161258U (en]) | 1988-04-22 | 1988-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01161258U (en]) |
-
1988
- 1988-04-22 JP JP5441188U patent/JPH01161258U/ja active Pending